資源描述:
《精密激光測(cè)距光學(xué)及采集系統(tǒng)設(shè)計(jì)》由會(huì)員上傳分享,免費(fèi)在線閱讀,更多相關(guān)內(nèi)容在學(xué)術(shù)論文-天天文庫(kù)。
1、華中科技大學(xué)碩士學(xué)位論文精密激光測(cè)距光學(xué)及采集系統(tǒng)設(shè)計(jì)姓名:徐思恩申請(qǐng)學(xué)位級(jí)別:碩士專業(yè):光電信息工程指導(dǎo)教師:王英20080528摘要隨著現(xiàn)代制造技術(shù)精度的不斷提高,發(fā)展納米測(cè)量技術(shù),建立納米計(jì)量測(cè)試標(biāo)準(zhǔn)成為計(jì)量與測(cè)試技術(shù)中十分重要的課題.納米測(cè)量技術(shù)是隨著納米及微米技術(shù)的發(fā)展而誕生的一門新興學(xué)科,無論在精細(xì)機(jī)械加工與微型機(jī)電系統(tǒng),還是在物理精密測(cè)量領(lǐng)域上,納米測(cè)量技術(shù)都有著廣泛的應(yīng)用.現(xiàn)在能夠?qū)崿F(xiàn)納米測(cè)量的方法主要有:電感電容測(cè)微儀、x射線干涉儀、外差式激光干涉儀、計(jì)量型掃描探針顯微鏡。本論文重點(diǎn)探討了在納米測(cè)量技術(shù)領(lǐng)域目前常用的雙頻激光外差干涉儀:(1)在
2、選題階段掌握和理解了各種激光外差干涉儀的光路結(jié)構(gòu)和應(yīng)用范圍。提出了采用聲光頻移器的全光纖外差測(cè)距方法。(2)完成了干涉儀系統(tǒng)的光學(xué)參數(shù)設(shè)計(jì),包括激光器功率,偏振度,線寬要求,同光路的設(shè)計(jì)原因和理論推導(dǎo),并進(jìn)行了干涉儀的光路調(diào)整和測(cè)量實(shí)驗(yàn);(3)設(shè)計(jì)了基于PCI-6221數(shù)據(jù)采集卡的,采用定時(shí)采集的函數(shù),以vc作為語(yǔ)言的界面設(shè)計(jì)初步模型;(4)對(duì)設(shè)計(jì)的各項(xiàng)光學(xué)參數(shù)(包括激光器功率,偏振度,線寬要求)進(jìn)行了測(cè)量和實(shí)驗(yàn),并給出了在頻移量為10kHz的情況下,初步外差測(cè)量結(jié)果。本論文以全光纖雙聲光激光外差干涉儀為主,外差測(cè)距第一階段已經(jīng)接近完成,軟件采集思路以及響應(yīng)數(shù)據(jù)
3、已經(jīng)得到,精度方面已經(jīng)可以達(dá)到nm級(jí)別,在國(guó)內(nèi)處于領(lǐng)先水平。關(guān)鍵詞:外差干涉儀外差信號(hào)線寬PCI-6221數(shù)據(jù)采集卡IAbstractAstheimprovementofprecisionmanufacturing,thedevelopmentofnanotechnologymeasurementtechnology,theestablishmentofnano-measurementtestbecameaveryimportanttaskofmeasurementandtestingtechnology.Thedevelopmentofnanotechnolo
4、gyandmicrontechnologygivedabirthtonano-testingtechnology,whetherinfinemachiningandmicro-electromechanicalsystems,orinthefieldofphysicalprecisionmeasurement,nano-testingtechnologyhadawiderangeofapplications.Nowthemethodstomeasurenanois:ICPcapacitancemicrometer,x-rayinterferometer,hete
5、rodyneLaserInterferometer,measurementofSPM.Thispaperfocusedonthemeasurementtechnologyinthefieldofnanotechnologyusedinthecurrentdual-frequencylaserheterodyneinterferometer:(1)Allkindsofexistingsignalprocessandapplyingrangebasedonopticalheterodyneinterferometerwereanalyzedandresearched
6、,thenall-opticalfiberheterodyneinterferometeroftwo-frequencylaserwasputforward..(2)Finishedthedesignofopticalinterferometerstructureandoverallparameters,includelinewidth,laserpower,polarization,thereasonsofheterodyneinterferometeroftwo-frequencylaserwereanalyzed,thenadjustedandmeasur
7、edtheopticalsystem.(3)UsingPCI-6221datagatheringcardandtheVC++todesigntheinterfaceofdatagathering.(4)Weconductedasystematicmeasurementexperimenttoalltheopticalparameters,thenthefirstresultoftheopticalpathanalysisofheterodyneinterferometerwasputforword(with10kHzfrequencyshift).Mainlyu
8、singtheall-o