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1、Seediscussions,stats,andauthorprofilesforthispublicationat:https://www.researchgate.net/publication/289183196Signal?lteringoflow-temperaturelow-pressureplasmadiagnosedwithLangmuirprobeArticleinZhenkongKexueyuJishuXuebao/JournalofVacuumScienceandTechnology·October2013DOI:10.
2、3969/j.issn.1672-7126.2013.10.08CITATIONSREADS056authors,including:AoLiUNSWSydney7PUBLICATIONS22CITATIONSSEEPROFILESomeoftheauthorsofthispublicationarealsoworkingontheserelatedprojects:ComputationalfluiddynamicsimulationViewprojectnumericalsimulationViewprojectAllcontentfol
3、lowingthispagewasuploadedbyAoLion17May2018.Theuserhasrequestedenhancementofthedownloadedfile.第33卷第10期真空科學(xué)與技術(shù)學(xué)報(bào)2013年10月CHINESEJOURNALOFVACUUMSCIENCEANDTECHNOLOGY995郎穆?tīng)柼结樀蜏氐蛪旱入x子體診斷*王曉冬張楊王慶李敖王瑞陳文(東北大學(xué)真空與流體工程研究所沈陽(yáng)110819)SignalFilteringofLow-TemperatureLow-PressurePlasmaDiagnose
4、dwithLangmuirProbe*WangXiaodong,ZhangYang,WangQing,LiAo,WangRui,ChenWen(SchoolofMechanicalEngineering&Automation,NortheasternUniversity,Shenyang110819,China)AbstractWeaddressedthedataprocessingofthesignalsindiagnosingalow-temperature,low-pressureplasmawithLangmuirprobe.Thec
5、orrelationbetweentheplasmapropertiesandthemeasuredcurrentandvoltage,withLangmuirprobe,wasevaluated,basedontheOrbitalMotionLimit(OML)ioncollectiontheory.Anovelmulti-digital-filtertech-nique,developedonthebasisofMATLAB,wasproposedtominimizethepossibleinterferenceoriginatedfro
6、mLangmuirprobe.Theimpactsofthedifferentfilteringtechniquesonthedataacquired,includingtheprobecurrent,electroncurrent,andthe1stand2ndderivativesoftheelectroncurrent,werecalculatedtooptimizethefilteringmethodandtoenhancetheaccuracyinplasmadiagnosiswithLangmuirprobe.KeywordsLa
7、ngmuirprobe,Plasmadiagnostics,OMLtheory,Multi-digital-filter,Digitalexperiment摘要基于OrbitalMotionLimit(OML)離子收集理論,建立了等離子體參數(shù)與朗繆爾探針電流、電壓之間的函數(shù)關(guān)系。將MATLAB作為編程工具,編制計(jì)算程序,采用多重濾波方法消除朗繆爾探針對(duì)等離子體產(chǎn)生的干擾。分析不同濾波方法對(duì)探針電流、電子電流、電子電流的一階和二階微分等朗繆爾探針診斷數(shù)據(jù)濾波的影響,與自行設(shè)計(jì)的數(shù)字實(shí)驗(yàn)結(jié)果進(jìn)行對(duì)比,選擇最優(yōu)濾波方法,以提高朗繆爾探針的診斷精度。
8、關(guān)鍵詞朗繆爾探針等離子體診斷OML離子收集理論多重濾波數(shù)字實(shí)驗(yàn)中圖分類(lèi)號(hào):O536;O461.2;TN305.8文獻(xiàn)標(biāo)識(shí)碼:Adoi:10.3969/j.issn.