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1、西北工業(yè)大學(xué)工學(xué)碩士學(xué)位論文AbstractOxidationresistanceofC/SiCcompositeswithamulti-SiCcoating(SiC-C/SiC)shouldbeimprovedtomeetthedemandofhighperformanceaeroenginesupto16500Cforalongtime.CoatingcracksanddefectsaremainreasonsforthelimitedoxidationresistanceofSiC-C/SiC.Inthisthesis,surfacem
2、odificationofSiCcoatingwascarriedoutwithPhysicalVaporDeposition(PVD)andIonImplantation&Deposition.usingAl,BandSi.EfectsofthemodifiedcoatingsontheoxidationresistanceofSiC-C/SiCwerestudiedwithSEM,XRDandAESandsoon.Themaincontentsandresultsareasfollows:(1)Coatingcracks.wereseal
3、edornarrowedbyvacuumevaporatinganAlfilmof3um.WightlossesofSiC-C/SiCinsimulatedairat5000C,6000Cand700'Cwereallremarkablyreduced,butthevalueswerestilllarge.(2)CoatingcracksanddefectswerepartlysealedbymagnetronsputeringaSifilmof3um,andweightlossofSiC-C/SiCinsimulatedairat13000
4、Cwasreduced.(3)SiCbecameamorphousasaresultofMetalVaporVacuumArc(MEVVA)sourceAlimplantation.ElectronCyclotronResonance(ECR)sourceB(1017ions/cm2)implantationorSi(1016ions/cm2)implantationhadthesameresults.Cracksstillexistedanddefectschangedlitle.OxidationresistanceofSiC-C/SiC
5、insimulatedairhadbeenimprovedat13000Cbutnotat7000CwithAlimplantation,andimprovedat12000Caswellas13000CwithBimplantation.Noremarkablechangewasfoundat13000CwithSiimplantation(4)AnnealofSiC-C/SiCwithSiimplantationinvacuumat1600'Cfor30minhadresultedinproductionofnewcracks,which
6、ledtolargerweightlossofthecomposite.(5)GlassyoxidefilmofsamplesprocessedbyMEVVAAUPIIDSicoveredthesurfaceofSiCcoatingthicklyanduniformly,andleftfewholesasaresultofagoodabilityofsealing,whichmadeweightlossofSiC-C/SiCsmallerinairat13000CKeyWords:C/SiCComposite,SiCCoating,Oxida
7、tionResistance,SurfaceModification,VacuumEvaporation,MagnetronSputtering,IonImplantationandDeposition西北工業(yè)大學(xué)工學(xué)碩士學(xué)位論文第一章緒論1.1C/Sic復(fù)合材料連續(xù)碳纖維增韌碳化硅陶瓷復(fù)合材料(C/Sic)具有耐高溫、低密度、高比強(qiáng)、高比模、抗氧化和抗燒蝕等優(yōu)異性能，具有類似金屬的斷裂行為、對(duì)裂紋不敏感、沒(méi)有災(zāi)難性損毀，被普遍認(rèn)為是高性能發(fā)動(dòng)機(jī)用高溫結(jié)構(gòu)材料之一，應(yīng)用范圍可覆蓋瞬時(shí)壽命(數(shù)十秒一數(shù)百秒)、有限壽命(數(shù)十分鐘一數(shù)十小時(shí))和長(zhǎng)壽
8、命(數(shù)百小時(shí)一上千小時(shí))，對(duì)應(yīng)溫度區(qū)間分別為:2800`C一30000C.2000℃一2200℃和1650'C['一]。C/Sic復(fù)合材料主要應(yīng)用于發(fā)動(dòng)機(jī)的燃燒室、
