資源描述：
《zr基非晶合金微齒輪成形及性能研究》由會員上傳分享，免費在線閱讀，更多相關(guān)內(nèi)容在教育資源-天天文庫。
1、華中科技大學(xué)碩士學(xué)位論文AbstractAsanimportantpartoftheMEMSdevices,micro-geariscurrentlydevelopingtothedirectionofcomplicationandminiaturization,andthereliabilityproblemsofitsstructurewouldemergewithitstrendtobesmallerandmoreprecision.Metallicglassshowsgreatapplicationprospectinthefieldofmicr
2、o-nanofabricationowingtoitsexcellentproperties.ThisarticlefocusesontheZr-basedmetallicglasstoresearchitssuperplasticformingprocess.Wetestedthepropertyofmicro-gearandachievehigh-speedrotationandassemblyofmicro-gearchainundermicro-meterscale.Themaincontentsareasfollows:(1)At220K/mi
3、nheatingrate,weinvestigatedthebesttemperaturerangeforZr-basedmetallicglassformingprocessandtheeffectsofdwelltimeonstrain.Accordingtothestatisticalexperiment,weanalyzedthebreakreasonofsiliconmoldandgotaconclusionthatthebreakprobabilitycanbereducedbyusingfixture.Thenthemicro-gearsw
4、ithclearandcompleteprofilewereformedandremainedamorphousstate.Inaddition,wedesignedtheoverlayprocessandmanufacturedthetwolayergear.(2)Inordertoverifythatthemorphologyofmicro-gearcansatisfyusingrequest,itsthickness,endfacetiltangleandsurfaceroughnessweretestedusingconfocalmicrosco
5、py.ThehardnessandYoung’smodulusofgearweremeasuredusingnanoindentationtechnology.Fromtheload-displacementfigure,wedrewaconclusionthatmicro-gearwouldbeeasiertodeformunderhighloadingrate.(3)Poweredbyamicro-steppingmotor,thethreedegreesoffreedommicro-platformwasestablishedtobuildmesh
6、systembetweendrivegearandmicro-gearchain.Underhigh-speed,thewearconditionofmicro-gearwasobservedafterrotationfor10hand100h.Afterthemicro-gearsystemrunning1h,wecomparedtheenergyspectrumoflubricantsofdifferentmeshsystemandcarriedouttheimpacttesttoverifytheexcellentmechanicalpropert
7、iesofmetallicglassmicro-gear.Inthispaper,theformingprocessofZr-basedmetallicglasswasstudiedandthepropertiesofmicro-gearweretested.Themicro-gearsystemwhichwasabletorunforalongtimeunderhighspeedwasassembled,thuscanbehelpfulforpromotingtheapplicationofmicro-gearinthefieldofmicro-nan
8、omanufacture.Keywords:MetallicGlass,Micr
