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1、摘要近年來(lái)，射頻微電子機(jī)械系統(tǒng)(RFMEMS)技術(shù)在現(xiàn)代通信領(lǐng)域中越來(lái)越受到重視。與傳統(tǒng)的半導(dǎo)體開(kāi)關(guān)相比，RFMEMS開(kāi)關(guān)具有低插入損耗、高隔離度、線性度好等優(yōu)點(diǎn)。隨著RFMEMS開(kāi)關(guān)研究地深入及可靠性的提高，其市場(chǎng)會(huì)越來(lái)越廣闊。本文設(shè)計(jì)了四種單刀雙擲RFMEMS開(kāi)關(guān)，這四種開(kāi)關(guān)都是建立在并聯(lián)固支梁式開(kāi)關(guān)和串聯(lián)懸臂梁式單刀單擲開(kāi)關(guān)的基礎(chǔ)上。通過(guò)對(duì)單刀雙擲開(kāi)關(guān)的討論與分析，相同的原理可以應(yīng)用于包含有單刀多擲和雙刀雙擲的開(kāi)關(guān)陣列中。本文首先分析了并聯(lián)和串聯(lián)兩種單刀單擲開(kāi)關(guān)的工作原理，在保證特征阻抗匹配和深入研究傳輸線影響因素的基礎(chǔ)上，先進(jìn)行兩種單刀單擲開(kāi)關(guān)的設(shè)
2、計(jì)。然后根據(jù)這兩種單刀單擲開(kāi)關(guān)設(shè)計(jì)出了四種不同結(jié)構(gòu)的單刀雙擲開(kāi)關(guān)。單刀雙擲開(kāi)關(guān)中兩個(gè)開(kāi)關(guān)的距離以及輸入端的結(jié)構(gòu)是設(shè)計(jì)時(shí)需要重點(diǎn)考慮的。兩種并聯(lián)設(shè)計(jì)的單刀雙擲開(kāi)關(guān)均應(yīng)用于20~40GHz，串聯(lián)設(shè)計(jì)的開(kāi)關(guān)應(yīng)用于0~20GHz，而另一種單刀雙擲開(kāi)關(guān)，一端采用的并聯(lián)固支梁式開(kāi)關(guān)，另一端采用的串聯(lián)懸臂梁式開(kāi)關(guān)，當(dāng)兩個(gè)輸出端的工作頻率分別要求處在低頻和高頻時(shí)，具有很高的應(yīng)用價(jià)值。在完成初步設(shè)計(jì)后，使用AnsoftHFSS軟件對(duì)開(kāi)關(guān)射頻性能進(jìn)行分析，并且在保證開(kāi)關(guān)射頻性能的前提下對(duì)開(kāi)關(guān)進(jìn)行結(jié)構(gòu)上的優(yōu)化。關(guān)鍵詞：RFMEMS開(kāi)關(guān)，單刀雙擲，插入損耗，隔離度IABSTRAC
3、TInrecentyears，RFMEMStechnologybecomesmoreandmoreattractiveinthecommunicationfield.Comparingwithtraditionalsemiconductorswitch,ithasthemeritoflowinsertionloss,highisolationandgoodlinearity.Themarketwilldefinitelygrowwithfurtherresearchofswitchandimprovementofswitchlifetime.Fourkin
4、dsofSP2Tswitchesaredesignedinthispaper,whichareallbasedonparallelconnectionofclamped-endbeamswitchandseriesconnectionofcantileverbeamswitch.WiththediscussionandanalysisofSP2Tswitch,thesameprinciplecanbeappliedtothedesignofswitcharrayssuchasSPNTandDP2Tswitches.First，thispaperanalyz
5、estheworkingprincipleofparallelconnectionswitchandseriesconnectionswitch.Onthefoundationoffurtherstudyingandtheassuranceofcharacteristicimpedancematched,twotypicalSP1Tswitchesaredesigned.OnthebasisofthetwoSP1Tswitches,fourSP2Tswitchesaredesigned.Thedistancebetweentwosingleswitches
6、andthestructureofinputportarethekeyconsiderationindesigning.TwokindsofparallelconnectionSP2Tswitchesareusedinfrequenciesfrom20to40GHz.SeriesconnectionSP2Tswitchisusedinfrequenciesfrom0to20GHz.Oneparallelconnectionswitchandoneseriesconnectionswitchareseparatelyconnectedonthetwooutp
7、utportsofthelastSP2Tswitch,whichishighlyvaluablewhentheworkingfrequenciesoftwooutputportsseparatelydemandtobeatlowfrequencyandhighfrequency.Finally,AnsoftHFSSisusedtoanalyzetheRFperformanceofswitches,andstructuresofswitchesareoptimizedunderthepremiseofgoodRFperformanceofswitches.K
8、eywords:RFMEMSswitch,SP2T,inserti
