資源描述：
《光纖法布里—珀羅MEMS壓力傳感器的研究》由會員上傳分享，免費在線閱讀，更多相關(guān)內(nèi)容在學(xué)術(shù)論文-天天文庫。
1、南京師范大學(xué)博士學(xué)位論文光纖法布里—珀羅MEMS壓力傳感器的研究姓名：葛益嫻申請學(xué)位級別：博士專業(yè)：物理電子學(xué)指導(dǎo)教師：王鳴20090524AbstractIndustryproductionandnationaldefenserequireamassofmicrosensorswhichhavethecharacteristicsofmultifunction，hi曲sensitivityandbatchproduction．Micro-Electro-MechanicalSystems(MEMS)sensorandfibersensorarealsothe
2、hotareasofresearchatpresent．OpticalfiberMEMSsensorhavetheadvantagesofbothMEMSSensorandthefiberSeg．SOFwhichhasthepropertiesoflargebandwidlh,hi薛sensitivity,largerangeofdynamictestsandhasaconfigurationthatcarlbereadilyincorporatedintosensorarrays．TheopticMEMSsensorwestudiedisanimprovem
3、entQfthepresentpressureSeBSOLItmaysolvetheproblemsofmicrominiaturizationandbatchproductionandbeabletosurviveinharshenvironmentssuchaselectromagneticinterferenceandflammability．Itmayhaveagoodprospectinpetrochemicalindustryandaviation．AkindofopticalfiberMEMSpressuresensorbasedonphased
4、emodulationisdesignedandfabricated．TheopticalfiberMEMSpressuresensorisdesignedbytheoreticalanalysisandnumericalsimulation．TheimpactofthesensorparametersOffperformanceisdiscussedandoptimized．AuniqueconfigurationofSi-Glass-Fibermicrocavityispresented，whichutilizesthecommercialfiberand
5、flange．Thedemodulationsystemofthesensorissetup。AphasedemodulationmethodbasedOffaFouriertransformationisexploredExperimentalresultsdemonstratethatthesensorhasreasonableperformance，AnopticalMEMSpressuresensorbasedonamesa-diaphragmispresented．Themechanicalmodelofthesensorisfoundandmaxi
6、umdeflectionofthemembraneisdeduced．Thesignalaveragingeffectofthemesadiaphragmisvalidatedbysimulation,andiscomparedwiththeplanaroneolltheparallelism。Fabricationprocessofthesensoris‘introduced,especiallythedoublealignmentinthephotolithography．Experimentalresultsdemonstratethatthesenso
7、rhasareasonablelinearityandsensitivity．AkindofminiatureFabry-PerotfiberopticalpressuresensorbasedonfiberⅡAbstractetchingtechnologyhasbeendeveloped．Its址1-silicastructureh硒goodstabilityforlong-termuse．Inaddition,itiscabinet,simpleforfabricationandIOWcost．Thesensitivityandresolutionare
8、discussed．Thefabric
