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1、規(guī)械度2009,31(2):225.230端面約束單晶硅直梁MEMS掃描微鏡應力特性研究STUDYONSTRESSESCHARACTEI江ST【CSOF佃僵SSCANNINGMⅡCROM[【】RRoRWITHEND—RESTRADDSGLECRYSrI’.ALSILICONToRSIoNBAR穆參軍張飛嶺張寧趙本剛吳亞明(1.中國科學院上海微系統(tǒng)與信息技術研究所,上海200050)(2.西安電子科技大學電子工程學院,西安710071)(3.西安市戶縣質量技術監(jiān)督局,西安710300)MUCanJunZHANGFeiLing’ZHANGNing
2、~ZHAOBenGangWUYaMing(1.ShanghaiInstituteofMicro-systemandInformationTechnology,ChineseAcademyofSciences,Shanghai200050,China)(2.SchoolofElectronicEngineering,XidianUniversity,Xian710071,China)(3.HuCountyBureauofpyandTechnicalSupervision,Xian710300,China)摘要結合微機電系統(tǒng)(micro-elec
3、tronic.mechanicalsystem,MEMS)掃描微鏡結構以及單晶硅材料正交各向異性的特點,理論分析端面約束單晶硅直梁MEMS掃描微鏡的應力特性,得到器件工作時扭轉梁上正確的應力分布及其特征,所得結論與有限元仿真結果進行比較。結果表明由于端部約束效應的影響,作用在MEMS掃描微鏡上的驅動力矩分別通過純扭轉力矩和橫向彎矩,在扭轉梁上傳遞,導致在扭轉梁產生正應力、附加剪切應力和扭轉剪切應力,其中扭轉剪切應力最大值位于扭轉梁中部截面長邊中點處,而正應力和附加剪切應力最大值分別位于約束端部截面四角處和截面短邊中點處。隨著扭轉梁截面形狀趨近
4、于窄的矩形,端面約束效應會愈加明顯,約束端部截面的正應力越大于其他兩種應力,經過有限元分析獲得與分析解較為一致的結果。關鍵詞微機電系統(tǒng)掃描微鏡約束扭轉單晶硅直梁橫向彎矩扭轉力矩中圖分類號TN302TB125Al~raetThestressescharacteristicsofmicro-electronic—mechanicalsystem(MEMS)scanningmicromirrorwithend-restrainedprismaticbarsofrectangularcrosssectionareinvestigated,consid
5、eringtheactualstructuresofMEMSscanningmirrorandtheonllicmaterialanisotropyefectsofsinglecrystalSilicon.TheaccuratestressesdistributionsonthesinglecrystalSiliconprismaticbarandtheircharacteristicsareobtainedrespectively,whileMEMSscanningmicmmirrorisinoperation.Ithasbeenshown
6、thatthedrivingtorqueofMEMSscanningmirroraretransferredonthetwistingbarsthroughpuretorsiontorqueinthemiddlecrosssectionsandtransver~bendingmomentnearthefixedcrosssectionsduetotheefectsonrestrainedwarping.Asaresult,thelongitudinallynormalstressandadditionalshearingstressappea
7、ronthetwistingbarsaswellastorsionshearingstress,andthelongitudinalynormalstressusuallyislargerthantheotherswhenthecross—sectionofprismaticbarclosestothenarrowerrectangularsection.TheseconclusionsalegreatusefultounderstandthestressesdistributionofMEMSscanningmirrorinordertoi
8、mprovethereliabilityofMEMSscanningmirrorwhiledesigningthedevic—es.KeywordsMicro-de