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1、GroupMeetingDong-MingFangApril18,2008WorkinthelasttwoweeksCompleted…1Read…2Read…3Read…4Downloaded…5Conceiving…6WorkinthelasttwoweeksCompletedPPTfilefororalspeechInEnglishProperContentsAbout35PagesWorkinthelasttwoweeksThesisdraftwrittenby…Design…1.Fabrication…2.Measured…3.Workin
2、thelasttwoweeksProcessesInformationStoragePECVD:SiO2,Si3N4,SiCSputter:Ti,Au,Pt,Al,Cr,W,PbLPCVD:PolySi,SiO2,Si3N4SiOxidation:HO,O2,H2OMembraneIonInjection:As+,P+,B+,BF2+Diffusion:P+,B+AdjustingICP:Si,Ti/Al,Cr/Cu,Cr/Pt,Ti/Pt/Au,Pyrex,SiO2RIE:Si,SiO2,Si3N4,SiO2,Solutions:KOH,BHF,H
3、F,H3PO4EtchingAnode(electrostatic),Au-Si,hotBondingWorkinthelasttwoweeks1.SiliconMicrofabrication:…..2.MEMSReliability:…..3.NSFCRequisition:….4.Other:PublishedpapersofIMEReferencesandPPTfilesWorkinthelasttwoweeksSafetyandOperationHandbookSafetyExit,Fireextinguisher,Showerequipm
4、ent,EyebathsystemMSDSHealthhazard,Firehazard,Specifichazard,ReactivityEtchingRoom600m2，Etchingplatform,Shelf,ReagentchemicalsFutureworkinthenextweekSimulate….Read…Learn…WorkinthelastweekPassedthe…1Readreferences…2Simulatedandanalyzed…3Designthefabrication…4WorkinthelastweekTuni
5、nglinearityOutputpowerFrequencypullingTuningsensitivityFrequencyrangeHarmonicrejectionFrequencypushingThemainperformancefigures….Workinthelastmonth2.學(xué)習(xí)….仿真1.查閱文獻(xiàn)4.進(jìn)實(shí)驗(yàn)室….3.…工藝制作流程Workinthelastmonth實(shí)驗(yàn)相關(guān)曝光顯影電鍍甩膠烘膠正膠AZP4903Workinthelastmonth2008.4.22用…2008.4.25….大概15umWorkinthelast
6、twoweeks電鍍……項(xiàng)目申請…申請的準(zhǔn)備3….會(huì)議投稿124Workinthelasttwoweeks稀釋HF溶液HF0.4mol/L，腐蝕速率：室溫100nm/s，32度時(shí)200nm/sHF2.6mol/LHNO32.2mol/L32度時(shí)300nm/sTi濕法腐蝕50:1:1H2O:HF:HNO320:1:1H2O:HF:H2O21:1:20HF:H2O2:HNO3WorkinthelasttwoweeksI20.09mol/LKI0.6mol/L腐蝕速率：室溫8-15nm/sAu濕法腐蝕1:2:10I2:KI:H2O25g：7g：100mlB
7、r2:KI:H2O1:2:3HF:HAc:HNO3Workinthelasttwoweeks國家基金對項(xiàng)目的要求越來越高基礎(chǔ)性前瞻性戰(zhàn)略性強(qiáng)調(diào)原創(chuàng)性提高交叉項(xiàng)目的強(qiáng)度和比例強(qiáng)調(diào)學(xué)科交叉Workinthelasttwoweeks研究實(shí)力寫作技巧創(chuàng)新思想一新遮百丑基金有多種手段保護(hù)創(chuàng)新思想以往的研究積累和研究水平準(zhǔn)確、清晰、具體、可行的研究計(jì)劃申請基金的三要素Workinthelasttwoweeks申請書的核心問題創(chuàng)新性重要性實(shí)用性連續(xù)性可行性科學(xué)選題做什么（What）-問題的提出為什么（Why）-意義分析怎么做（How）-技術(shù)路線立項(xiàng)依據(jù)工作積累實(shí)驗(yàn)
8、條件人才梯隊(duì)支持條件Workinthelasttwoweeks立項(xiàng)依據(jù)闡述項(xiàng)目對社會(huì)或經(jīng)濟(jì)的意義1本項(xiàng)目國內(nèi)
