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1、晶體生長(zhǎng)計(jì)算軟件FEMAG之晶體生長(zhǎng)方法匯編BulkCrystalsMaterialsFEMAGSoft?2010Wholeindustriesrelyonbulk-growncrystalsofavarietyofmaterialsSilcion/GermaniumforsemiconductorandsolarindustryIII-Vcompunds(GaAsInpInSbSiCGaNetc)fortelecommication,LED,defenseandsolarindustryHgCdTeforinfraredimagingFluoride/Halide/oxides
2、cintillatorcrystalsforhigh-energyphysics,medicalimagingandopticalindustriesetc.BulkCrystalGrowthMethodsFEMAGSoft?2010Czochralski(CZ)FloatingZone(FZ)DirectionalSolidification(DSS)Vertical/HorizontalBridgman(VB)VerticalGradientfreeze(VGF)PhysicalVaporTransport(PVT)SiliconCrystalGrowthMethodFEMA
3、GSoft?2010StringRibbon(PatentedbyEVERGREEN)EFGHotzoneimportanceFEMAGSoft?2010ThekeyimportantthingforallgrowthprocessesistheHotzoneandassociatedoperatingcondtions,whichcontrolthemajorcharactersticsofcrystals,andthestructureofthehotzoneandassociatedoperatingconditionsarethemajorknow-howofeachIC
4、wafermanufacturers.CzochralskiGrowthMethodFEMAGSoft?2010FEMAGSoft?2006CzochralskiGrowthMethodFEMAGSoft?2010FEMAGSoft?2006CzochralskiMethodAround90%singlecrystalgrownbyCzmethodinICindustryPartofGermaniumcrystalgrownbyCZmethodSappherandlotsCompoundcrystalgrownbyCZoritsvariants,suchasKyropoulos,
5、LECetc.MarketshareofCZwaferinsolarmarketslightlylowerthanDSSmcwaferCzochralskiGrowthMethodFEMAGSoft?2010FEMAGSoft?2006HottopicsonceinICindustry,andcurrentlyhottopicsforsolar:allaboutgrowthyield,andthenqualityimprovementCCZwithmulti-meltpartitionsMCZGrowthrateimprovementImpuritycontrol(oxygen,
6、carbon)anddopantsmicrovoidsanddislocationsoncellefficiencyCzochralskiGrowthMethod(MCZ)FEMAGSoft?2010FEMAGSoft?2006Costreductionislimitedwithrespectedtotheequipments/consumablesmodificationsInnotativeeffortsarerequiredtofurtherbeimprovedCzochralskiGrowthMethod(MCZ)FEMAGSoft?2010FEMAGSoft?2006V
7、ertical:Cusp:Horizontal:FEMAGSoft?2006CzochralskiGrowthMethodFEMAGSoft?2010FEMAGSoft?2006Itisassumedthatforacertainregionofthethermalstressesthecrystalisinametastablestate,andacertainperturbationenergyisnecessarytoleavethismetastablestate.Byt
