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1、摻雜Zno薄膜的生長及其儲鏗性能研究作者:徐浩導(dǎo)師:陸防教授復(fù)旦大學(xué)物理學(xué)系2011年5月20日日錄目錄摘要.........................................................................................……1Abstract.....................................................................................……2第一章緒論…,.
2、.........................................................................……41.1zno晶體概括...................................................·················……1.1.IAI摻雜zno.............……,.…,.,..................·..···············……1.1.2VI族元素?fù)诫s的Zn0.......
3、............................................……51.2鏗離子電池概述............................................……,..............……51.2.1鏗離子電池的發(fā)展歷史................……,.........................……51.2.2鏗離子電池的工作原理................................................……71
4、.2.3鏗離子電池的電極材料................................................……81.2.3.1負(fù)極材料............................·····························……81.2.3.2正極材料.…,...……,........................·················……101.3本論文的研究內(nèi)容和意義.,.................................
5、.................……n參考文獻(xiàn).......................................................……,...............……11第二章樣品制備及測試手段.............……,....................................……172.1脈沖激光沉積(PulsedLaserDePosition)技術(shù)..............................……172.1.1脈沖激光沉積制備
6、薄膜的基本原理...............................……172.1.2實(shí)驗(yàn)裝置示意圖.......................................................……182.1.3脈沖激光沉積技術(shù)的特點(diǎn)...................……,.................……192.2磁控濺射(MagnetronSPutering)鍍膜技術(shù)................................……202.2.1濺射理論、、
7、................................................·····.········……02.2.2輝光放電................................................················……212.2.3磁控濺射鍍膜..........................................................……232.3薄膜的物性表征及測試................……,...
8、............................……242.3.1質(zhì)量測定—數(shù)字式微量天平.....................................……242.3.2薄膜的厚度測定—探針式表面輪廓儀.........................……242.3.3電學(xué)性能的測試—霍爾儀........................................……252.3.4X射線衍射(XRD)...................................