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1、第12卷第3期納米技術(shù)與精密I程V01.12No.32014年5月NanOtechn0l0gyandPrecisionEngineeringM2014DOI10.13494/j.npe.20130086硅薄膜導(dǎo)熱系數(shù)微尺度效應(yīng)的臨界尺寸蘇高輝,楊自春,孫豐瑞(1.海軍工程大學(xué)艦船高溫結(jié)構(gòu)復(fù)合材料研究室,武漢430033;2.海軍T程大學(xué)動力工程學(xué)院,武漢430033)摘要:基于灰介質(zhì)假設(shè)及擬合的色散關(guān)系,采用蒙特卡洛方法對微納米硅薄膜內(nèi)的聲子熱輸運(yùn)特性進(jìn)行了模擬.將3m厚的硅薄膜導(dǎo)熱系數(shù)的計(jì)算結(jié)果與文獻(xiàn)結(jié)
2、果進(jìn)行了對比,二者吻合較好.分析了厚度對薄膜內(nèi)溫度場及導(dǎo)熱系數(shù)的影響.結(jié)果表明,3"-厚度小于某一尺度時(shí),薄膜導(dǎo)熱系數(shù)會隨著厚度的減小而降低,呈現(xiàn)尺度效應(yīng);薄膜內(nèi)溫度場也不再是線性分布,而是在邊界處呈現(xiàn)階躍特性,且隨著厚度減小,溫度階躍增大.基于該方法求得了100~400K溫度區(qū)間內(nèi),硅薄膜法向?qū)嵯禂?shù)出現(xiàn)明顯尺度效應(yīng)的臨界尺寸.計(jì)算發(fā)現(xiàn),隨著溫度的升高,臨界尺寸變化范圍很大,平均溫度為100K時(shí),臨界尺寸約為50m,平均溫度為400K時(shí),臨界尺寸約為2.5m,前后相差了一個(gè)數(shù)量級.關(guān)鍵詞:硅薄膜;蒙特卡
3、洛方法;導(dǎo)熱系數(shù);聲子熱輸運(yùn);尺度效應(yīng)中圖分類號:TK124文獻(xiàn)標(biāo)志碼:A文章編號:1672-6030(2014)03—0176—06CriticalSizef0rMicroscaleEffect0fSiliconFilmThermalConductivity—SuGaohui一,YangZichun一,SunFengmi(1.InstituteofHighTemperatureStructuralCompositeMaterialsforNavalShip,NavalUniversityofEngine
4、ering,Wuhan430033,China;2.CollegeofPowerEngineering,NavalUniversityofEngineering,Wuhan430033,China)Abstract:Basedonthegraymediaapproximationandthefitteddispersionrelation,thephononheattransportinmicro—nanosiliconfilmswassimulatedwiththeMonteCarlomethod.Th
5、epredictedthermalconductivity(TC)ofsiliconfilmwith3txmthicknesswasingoodagreementwithliteratureresults.Theeffectofthethicknessonthetemperaturefieldandcross.planeTCofthesiliconfilmswasanalyzed.TheresultsshowthatwhenthethicknessiSlessthanacertainscale.theTC
6、ofthefilmdecreaseswiththede.creaseinthickness,whichexhibitsscaleeffect:thetemperaturefieldisnotinlineardistribution.butshowsdiscontinuouscharacteristicsattheboundary.a(chǎn)ndasthethicknessdecreases,thetemperaturedis—continuitydegreeinereases.Thecriticalsizeatw
7、hichTCbeginstoshowobviousscaleeffectwasobtainedatthetemperaturerangebetween100Kand400K.Calculatedresultsshowthatasthetemperaturein。creases,thecriticalsizedecreasessharply.Whentheaveragetemperatureis100Kthecriticalsizeis,about50m;whentheaveragetemperaturei
8、s400K,thecriticalsizeisabout2.5I.zm,whichshowsadifferenceofanorderofmagnitude.Keywords:siliconfilm;MonteCarlomethod;thermalconductivity;phononheattransport;scaleeffect近年來,微電子、光電子、熱電材料、微/納機(jī)電系熱設(shè)計(jì)、熱管理和熱優(yōu)化問題¨j.研究微尺度環(huán)境下統(tǒng)