資源描述：
《CUSP磁場對8英寸半導體級硅晶體生長的影響(全球半導體晶體生長建模著名商業(yè)軟件FEMAG).ppt》由會員上傳分享，免費在線閱讀，更多相關內容在教育資源-天天文庫。
1、全球半導體晶體生長建模著名商業(yè)軟件FEMAG--CUSP磁場對8英寸半導體級硅晶體生長的影響ReportBrukerASCFeb,9,2012FEMAGSoft?2012FEMAGSoft?2012OBJECTIVEPROCESSCONDITIONCZfurnace-8inchdiametercrystal,24inchdiametercrucibleTopredicttheimpactofaCUSPmagneticfieldoperatingat140Awiththeneutral-axislo
2、catedonthemeltfreesurface.SIMULATIONPROCESSThegrowthprocessismodeledasTimedependentsimulationtakingintoaccountthetransienteffectstakingplaceduringthegrowthofthecrystalPARAMETERSOBSERVEDTheconcentrationoftheOxygeninthemeltandcrystal.Theconcentrationoft
3、hePhosphorousinthemeltandcrystalTheconcentrationoftheCarboninthemeltandcrystalFEMAGSoft?2012CRYSTALRADIALOXYGENMEASUREMENTPOSITIONSFEMAGSoft?2011PREDICTIONOFRADIALOXYGENCONCENTRATIONFEMAGSoft?2012PREDICTIONOFRADIALOXYGENCONCENTRATIONFEMAGSoft?2012PRED
4、ICTIONOFOXYGENCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft?2012PREDICTIONOFCARBONCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft?2012PREDICTIONOFPHOSPHOROUSCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft?2012CUSPvsNOCUSP-OXYGENCONCENTRATION-CRYS
5、TALFEMAGSoft?2012CUSPvsNOCUSP-CARBONCONCENTRATION-CRYSTALFEMAGSoft?2012CUSPvsNOCUSP-PHOSPHOROUSCONCENTRATION-CRYSTALFEMAGSoft?2011CUSPvsNOCUSP-PHOSPHORUSRESISTIVITY-CRYSTALFEMAGSoft?2011PREDICTIONOFRADIALPHOSPHORUSRESISTIVITYFEMAGSoft?2012NOCUSPVSCUSP
6、TEMPERATUREINTHEMELTAnimation–Temperature-melt.aviFEMAGSoft?2012NOCUSPvsCUSP–MELTTURBULENTVISCOSITYAnimation–Turbulentviscosity-melt.aviFEMAGSoft?2012NOCUSPvsCUSP-VELOCITY&STREAMFUNCTIONAnimation-psi-melt.aviFEMAGSoft?2012NOCUSPvsCUSP-OXYGENINTHEMELTA
7、nimation-Oxygen-melt.aviFEMAGSoft?2012NOCUSPvsCUSP-PHOSPHOROUSINTHEMELT-1Animation-Phosphorous-melt.aviFEMAGSoft?2012NOCUSPvsCUSP-PHOSPHOROUSINTHEMELT-2Animation-Phosphorous-melt2.aviFEMAGSoft?2012NOCUSPvsCUSP-CARBONINTHEMELT-1Animation-Carbon-melt.av
8、iFEMAGSoft?2012NOCUSPvsCUSP-CARBONINTHEMELT-2Animation-Carbon-melt2.aviFEMAGSoft?2012NOCUSPvsCUSP-OXYGENINTHECRYSTALAnimation-Oxygen-ppm.aviFEMAGSoft?2012NOCUSPvsCUSP-PHOSPHOROUSINTHECRYSTALAnimation-Phosphorous-cry.aviFEMAGSoft?2012CUSPvsNOCU
