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1、半導(dǎo)體術(shù)語表第68頁共68頁A1stlevelpackaging第一級封裝2ndlevelpackaging第二級封裝aberration象差/色差absorption吸收accelerationcolumn加速管acceptor受主Accumulatev.積聚,堆積acid酸acousticstreaming聲學(xué)流activeregion有源區(qū)activate激活activateddopant激活雜質(zhì)activecomponent有源器件adsorption吸附aerosol懸浮顆粒airionizer空氣電離化器alignmentmark對準標記alig
2、nment對準alloy合金半導(dǎo)體術(shù)語表第68頁共68頁alternateadj.交替的,輪流的,預(yù)備的v.交替,輪流,改變aluminum鋁aluminumsubtractiveprocess鋁刻蝕工藝ambient環(huán)境ammonia(NH3)氨氣ammoniumfluoride(NH4F)氟化氨ammoniumhydroxide(NH4OH)氫氧化氨amorphous非晶的，無定型analog模擬信號angstrom埃anion陰離子anisotropicetchprofile各向異性刻蝕剖面anneal退火antimony(sb)銻antirelect
3、ivecoating(ARC)抗反射涂層APCVD常壓化學(xué)氣向淀積applicationspecificIC(ASIC)專用集成電路aqueoussolution水溶液areaarray面陣列argon（Ar）n.[化]氬半導(dǎo)體術(shù)語表第68頁共68頁arsenic(As)砷arsine(AsH3)砷化氫，砷烷ashing灰化，去膠aspectratio深寬比，高寬比aspectratiodependentetching(ARDE)與刻蝕相關(guān)的深寬比asphyxiant窒息劑assaynumber檢定數(shù)atmosphericadj.大氣的atmospheric
4、pressure大氣壓atmosphericpressureCVD(APCVD)常壓化學(xué)氣向淀積atomicforcemicroscopy(AFM)原子力顯微鏡atomicnumber原子序數(shù)attemptn.努力,嘗試,企圖vt.嘗試,企圖augerelectronspectroscopy(AES)俄歇電子能譜儀autodoping自摻雜automaticdefectclassification(ADC)缺陷自動分類Bback-endofline(BEOL)（生產(chǎn)線）后端工序backgrind減薄半導(dǎo)體術(shù)語表第68頁共68頁backingfilm背膜baf
5、flevt.困惑,阻礙,為難（擋片）baffleassemblyn.集合,裝配,集會,集結(jié),匯編（擋片塊）ballgridarray(BGA)球柵陣列ballroomlayout舞廳式布局，超凈間的布局barrelreactor圓桶型反應(yīng)室barriermetal阻擋層金屬barriervoltage勢壘電壓base基極，基區(qū)batch批bayandchaselayout生產(chǎn)區(qū)和技術(shù)夾層區(qū)beamblow-up離子束膨脹beamcurrent束流beamdeceleration束流減速beamenergy離子束能量beol（生產(chǎn)線）后端工序bestfocus
6、最佳聚焦BGA球柵陣列Biasing電壓拉偏BICMOS雙極CMOS半導(dǎo)體術(shù)語表第68頁共68頁bincodenumber分類代碼號binmap分類圖bipolarjunctiontransistor(BJT)雙極晶體管bipolartechnology雙極技術(shù)（工藝）bird’sbeakeffect鳥嘴效應(yīng)blanketdeposition均厚淀積blower增壓泵boat舟BOE氧化層刻蝕緩沖劑Bonvoyage[法]再見,一路順風[平安]bondingpads壓點bondingwire焊線，引線boron(B)硼borontrichloride(BCL
7、3)三氯化硼borontrifluoride(BF3)三氟化硼borophosphosilicateglass(BPSG)硼磷硅玻璃borosilicateglass(BSG)硼硅玻璃bottomantireflectivecoating(BARC)下減反射涂層boule單晶錠bracketn.墻上凸出的托架,括弧,支架v.括在一起半導(dǎo)體術(shù)語表第68頁共68頁breakthroughstep突破步驟，起始的干法刻蝕步驟brightfielddetection亮場檢查brushscrubbing涮洗bubbler帶鼓泡槽bufferedoxideetch(BO
8、E)氧化層腐蝕緩沖液bulkchemicaldist
