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1、第28卷第8期傳感技術(shù)學(xué)報V01．28NO．82015年8月CHINESEJOURNALOFSENSORSANDACTUATORSAug．2015DesignofMEMSOpticalFiberPressureSensorandDemodulationMethodImplementationCAOQun，JIAPinggang，XIONGl，一，ZHANGHairui，HONGYingping一。FANGGuocheng，(1．ScienceandTechnologyonElectronicTest
2、&MeasurementLaboratory，NorthUniversityofChina，Taiyuan030051，China；2．KeyLaboratoryInstrumentationScience&DynamicMeasurement，MinistryofEducation，NorthUniversityofChina，Taiyuan030051，China)Abstract：AkindofMEMSopticalfiberFabry-Perotpressuresensorwaspropos
3、edbasedonthepressuresensingprinciplewhichduetothechangeofcavitylengthcausedbythedeformationofsensitivediaphragmwhenpressureaDplied．Thesens0r’stheoreticalmodelbetweensensitivediaphragmdeflectionvariationwithfilmthickness，radiusandloadingpressurewasestab
4、lished．0nthebasis，thetwo—dimensionalsimulationusingMATLABandthree—dimensionalnumericalsimulationbyComsolMuhiphysicssoftwarewasperformedandtheprocessingfabricationofFPpressuresensingpartwasrealizedaswel1．Thusthedemodulationmethodwhichcanbeappliedtotheop
5、ticalfibersensingwasdesignedandrelatedexperimentsweretakenonaftertheimplementationofopticalfibersensingpressuretestingsystem．Byemployingthedesigneddemodulationmethod．thesensor’sperformanceandcharacteristicscanbetestedandverified．Theexpe．rimentalresults
6、indicatethatthelinearityofsensor’smeasuredcurveisgoodandbroadlyconsistentwiththereSUItsofnumericalsimulation，thesensitivityunder100kPaisabout62．3nm／kPawithatemperaturesensitivitycoeficientof0．023m／℃，themeasuredresolutionandprecisionare1．29kPaand3．93％re
7、spectivelythatconfirmedthemethodofMEMSopticalfiberpressuresensingsystemperformsapotentialpossibility．Keywords：opticalfibersensing；Fabry—Perotcavity；MEMSprocessing；demodulationmethod；MATLAB；ComsolMultiphysicsEEACC：2560；2575D；2575F；4190doi：10．39690．issn．
8、1004—1699．2015．08．008MEMS光纖法珀壓力傳感器的設(shè)計及解調(diào)方法實現(xiàn)曹群，賈平崗，熊繼軍，張海瑞，洪應(yīng)平，房國成，(1．中北大學(xué)電子測試技術(shù)國家重點實驗室，太原030051；2．中北大學(xué)儀器科學(xué)與動態(tài)測試教育部重點實驗室，太原030051)摘要：基于外界壓力引起敏感膜片形變導(dǎo)致腔長變化來實現(xiàn)壓力信號傳感的原理，提出了一種MEMS光纖法珀壓力傳感器的設(shè)計，建立了傳感器敏感膜片的撓度變化與膜厚、半徑及施加壓力的關(guān)系理論模型，并在此基礎(chǔ)上進行了膜片的MA
