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1、武漢T程大學(xué)碩十學(xué)位論文SiClx基團(tuán)，隨后H原子與SiClx基團(tuán)發(fā)生鏈?zhǔn)椒磻?yīng)生成HCl和Si等最終產(chǎn)物。發(fā)現(xiàn)氫氣的加入能增jJISiCl4的分解率，在微波功率為800W時，H0【線發(fā)射光譜的強度和SiCl4的分解率都隨SiCl4初始濃度的增加而減小，當(dāng)SiCl4濃度小于1％時，其分解率能維持在95％以上。測量了噴嘴上方等離子體射流軸向上的激發(fā)態(tài)氫原子的空間分布，結(jié)果表明射流中心的氫原子密度要大于兩端處的氫原子密度。關(guān)鍵詞：氫等離子體；發(fā)射光譜；微波放電；展寬；診斷IIAbstractHydrogenplasmagenerallygeneratedbyDC，RFan
2、dmicrowavehasnumerouspotentialapplicationsinplasmachemicalvapordeposition，plasmareactionkinetics，chemicalsynthesisandotherresearchwork．Insitu，nonintrusivediagnosisofhydrogenplasmaareoftenthekeytOunderstandingthephysical-chemicalprocessesintheplasmaandcontrollingtheplasmabehavior．Inthis
3、paper,plasmaparametersandinterrelatedplasmareactionprocessintwokindsofhydrogenmicrowavedischargessystemhavebeenmeasuredbyatomicemissionspectroscopy．(1)TheHBalmeremissionlineshavebeenmeasuredonahigh-pressure(10-40kPa)microwavedischargesusingpurehydrogen．Thelinestrength，thelineprofilesan
4、dthelinewidthofHatomBalmerlines(戰(zhàn)，Hp，H)havebeenstudied．Theinfluenceofthemicrowavepowerandworkingpressureontheelectronicexcitationtemperature，electrondensity,electricfieldstrengthandiontemperaturewereinvestigateddetailedly．Theresultsindicatethat：TheprofileofHatomiclinesisinaccordwithVoi
5、gtprofilesintheory．Thelinewidthof心，Hp，andHlinesincreasesinturn．Therelativeintensityofspectrallines，theelectrondensityandtheelectricfieldincreasewiththeincreaseofmicrowavepower,andincreasegraduallytoapeakvalueandthendecreaseswiththeincreaseofpressure，andallreachthemaximumatapressureof25
6、kPawhenthemicrowavepowerwassetat800W．Theelectronicexcitationtemperaturecontinuouslyreducedwiththeincreaseofpressureandthechangesofpressurehavelittleeffectoniontemperature．Withthemicrowavepowerincrease，theelectronicexcitationtemperatureandiontemperatureincreasewithadifferentextent．(2)Am
7、icrowaveplasmajetdevicehasbeendesignedtoexciteandIII武漢T程大學(xué)碩+學(xué)位論文maintainstableplasmaonatmosphericpress．TheemissionspectraofSiCl4／H2mixedgasdischargewereinvestigated．TheprocessandproductsofSICl4decompositionareanalysed．TheemissionintensityofHalineandthedecompositionefficiencyofSICl4at
