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1、Anal.Chem.2007,79,9135-9144FullyMicrofabricatedandIntegratedSU-8-BasedCapillaryElectrophoresis-ElectrosprayIonizationMicrochipsforMassSpectrometryTiinaSikanen,?,?SanteriTuomikoski,§RaimoA.Ketola,?,^RistoKostiainen,?SamiFranssila,§andTapioKotiaho*,?,?Labor
2、atoryofAnalyticalChemistry,DepartmentofChemistry,P.O.Box55,FI-00014UniversityofHelsinki,Finland,DivisionofPharmaceuticalChemistry,FacultyofPharmacy,P.O.Box56,FI-00014UniversityofHelsinki,Finland,MicroandNanosciencesLaboratory,DepartmentofElectricalandComm
3、unicationsEngineering,P.O.Box3500,FI-02015HelsinkiUniversityofTechnology,Finland,andDrugDiscoveryandDevelopmentTechnologyCenter,P.O.Box56,FI-00014UniversityofHelsinki,FinlandWepresentafullymicrofabricatedandmonolithicallyforbioanalysis.Inrecentyears,numer
4、ouschip-baseddesigns4-6integratedcapillaryelectrophoresis(CE)-electrosprayion-havebeenpresentedforminiaturizationoftheESIsourceinorderization(ESI)chipforcouplingwithhigh-throughputmasstoreachmoreefficientionizationthroughnanospray.7,8Mostspectrometric(MS)
5、analysis.Thechipsarefabricatedfullyimportantly,nanosprayionizationprovidesnotonlyincreasedofanegativephotoresistSU-8byastandardlithographicsensitivitybutalsodirectcouplingwithmicrofluidicseparationprocesswhichenablesstraightforwardbatchfabricationdevicesd
6、uetocongruentflowratesbetweenthetwo.ofmultiplechipswithpreciselycontrolleddimensionsChip-basedESIsourceshavebeenimplementedonvariousand,thus,reproducibleanalyticalperformancefromchipmaterials,includingsilicon,glass,andpolymers.4-6Dependingtochip.Asthecoax
7、ialsheathflowinterfaceispatternedonthematerialofchoice,manydifferentemitterdesignshaveasanintegralpartoftheSU-8chip,thefluidicdesignisbeenproposed,yettheadvantagesofsharp-pointedemittertipsdead-volume-free.Nosignificantpeakbroadeningoccursarewidelyacknowl
8、edgedinordertoavoidsamplespillageandsothatverynarrowpeakwidths(downto2-3s)aretoenablesmallTaylorconevolumeandhighelectricfieldstrengthobtained.Thesheathflowinterfacealsoenablescompre-atthetip.Thefirstfullymicrofabri
