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1、萬方數(shù)據(jù)東北大學(xué)碩士學(xué)位論文Abs訂actDesignandInvestigationofMicro--positioningPiezo·-stageSystemsAbstractMicro··nanopositioningtechnologyisakeytechnologyformodemhigh-·techmodemindustry．Inprecisionmanufacturing，ultra—precisionmeasurementandmicro—manipulationhavebeenwidelyusedinmanyfields．Inrecentyears，withthedeve
2、lopmentofmodemscience，technologyandindustry,micro—nanopositioningtechnologyisrequiredtobelargestroke，highprecisionandsmallsize．What’Smore，positioningaccuracyandresolutionhaverequiredtoachievethenanoscale，Micro—nanopositioningtechnologylevelsreflectacountry’Stechnologicaldevelopmentandoverallstreng
3、th．Developmicro—narloconductedpositioningtechnologyrelatedresearch．TopromotetherapiddevelopmentofChina’Sadvancedmanufacturing，ultra—precisionmachiningandmeasurement，defenseindustryandotherhigh—techindustryhasasignificantandfar-reachingsignificancePaperisonthebasisofreviewingsystemsonmicro—nanoposi
4、tioningstageresearchandapplicationstatus．Theoreticalanalysisandsimulationstudiesaretostartatwo—dimensionalaspectsofthefocusonmicro·nanopositioningstagedesignandanalysis，systemconstruction，etc．Firstdeterminethetwo--dimensionalmicro-．nanopositioningplatformtodrivethepiezoelectricceramic，flexiblehing
5、efortheimplementingagency,theuseoftheoveralldesigncapacitivedisplacementsensorandPIDcontr01．UsingSolidworks3Dmodelingplatformonmicro—nanopositioning．whichareanalyzedandcalculatedfromthepositioningplatformstiffness，displacementandnaturalfrequencyfromtheoutputthekeyparametersDeterminethedimensionsof
6、themicro—nanopositioningstageonthisbasis，andfiniteelementsimulationstaticsThenanalyzestheprincipleofpiezoelectricceramic，forcapacitancecharacteristicsofpiezoelectricactuators，hysteresis，creepproperties，nonlinearandtemperaturecharacteristicsareanalyzedtheoretically．Amathematicalmodelofpiezoelectric
7、actuatorsisbuilt，determinethepiezoelectricactuatortransferfunction，usePIDcontrolmethodtocontrolpiezoelectricactuators，thenthesimulationcurveisobtained，demonstratingtheeffectivenessofthecontrolV。萬方數(shù)據(jù)東北大學(xué)碩士學(xué)位論文Abs仃
