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1、河北工業(yè)大學(xué)博士學(xué)位論文ZnO和ZnO基稀磁半導(dǎo)體薄膜的PLD法制備及其特性研究姓名：滕曉云申請學(xué)位級別：博士專業(yè)：材料物理與化學(xué)指導(dǎo)教師：劉彩池;于威20070501ZnO和ZnO基稀磁半導(dǎo)體薄膜的PLD法制備及其特性研究PHYSICALCHARACTERISTICSOFZnOANDZnO-BASEDDILUTEDMAGNETICSEMICONDUCTORSFABRICATEDBYPLDABSTRACTThecrystallineZnOfilmshavebeendepositedbythepulsedlaserdeposition(PLD).Therelationbetweendif
2、ferentdepositionparametersandthestructurepropertiesofZnOfilmsisanalyzedandtheoptimizedconditionisobtained.Basedonthoseresults,thefilmswithAl,Ni,MndopinginZnOfilmshavealsobeenpreparedandtheinfluenceofdopingcontentsonpropertiesofthefilmsisstudied.Furthermore,usingaNd:YAGlaserasfundamentalbeam,thes
3、econd-harmonicefficiencyofthefilmsismeasured.Themainresultsareasfollows:ZnOthinfilmswithhighlyc-axisorientationhavebeenfabricatedbyPLDmethod.Theinfluenceofsubstratetemperatureandoxygenpressureonthepropertiesofthefilmsisstudied.ThereasonwhythegrowthmodelofZnOfilmschangedwiththedepositioncondition
4、isexplained.Theroom-temperaturePLspectraoftheZnOfilmsgrownatdifferentoxygenpressureshavebeeninvestigated.Allfilmsshowatypicalluminescencebehaviorwithanarrowultraviolet(UV)andabroadgreen-yellowband.ItisproposedthattheintensityofUVemissiondependsoncrystalstructureandthedeeplevelemissioncorrelatest
5、otheelectrontransitionsfromthebottomoftheconductionbandtotheantisiteoxygenOZn.HighqualityAldopingZnOtransparentconductivefilmshavebeenfabricatedbymixingAlintoZnOtarget.Theeffectofdopingconcentrationontheirstructure,electricalandopticalpropertiesisstudied.Theresultsshowthatthelowelectricalresisti
6、vitycanbeobtainedunderappropriatedopingcontentandtheopticaldirectbandgapoffilmsisdependentonthecarrierconcentration.High-qualityNi-,Mn-dopedZnOthinfilmshavebeendepositedandobviouslyii河北工業(yè)大學(xué)博士學(xué)位論文room-temperatureferromagneticbehaviorisobtained.Theeffectofdopingconcentrationontheferromagnetismmech
7、anismofZn1-xNixOfilmsisanalyzed.TheferromagnetismofZn1-xMnxOfilmsisstronglyrelatedtothedefectsinZnOfilms,butthecorrectdopingconcentrationiscrucialforobtainingroom-temperatureferromagnetism.UsingaNd:YAGlaserof1064nmasafundame
