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1、SEMIC13-95N/A?SEMI1995,1996TESTMETHODFORPARTICLESHEDDINGANDPENETRATIONPERFORMANCEOFPOINT-OF-USEGASFILTERS1Purpose4SummaryofMethod1.1Thepurposeofthisdocumentistodefineacom-4.1Thetestsequence(shownschematicallyinFigureprehensivestandardtestsequencetoderiveparticle-1)consistsoffivesteps:relate
2、dqualificationdataforpoint-of-use(POU)fil-1.Break-inters.2.Pulse2Scope3.Baking(optional)2.1Thistestmethoddefinesanevaluationmethodfor4.FinalPurge(optional)point-of-usefiltersofvariousmedia(e.g.,polymeric,ceramic,andmetallic)typicallyusedforfilteringinert5.Penetration(optional)andprocessgase
3、sinsemiconductorapplications.Point-of-usefiltersaredesignedtohandlerelatively5ApparatusandFacilitylowflowrates(0.5-100L/min.)andmoderate-to5.1GasSource—Clean,drynitrogenwithlessthanhigh-pressuredrops(0.5-15psig).Thefilterhousing0.5ppmmoistureandlessthan0.5ppmtotalhydrocar-andfiltrationeleme
4、ntarecombinedintoonesealedandbons.inseparableunit.5.2ParticleDetector—Acondensationnucleus3Limitationscounter(CNC)withcountingefficiencyof50%at0.01μm,asreportedbythemanufacturer,isrecommended3.1Thesetestmethodsdonotapplytogasfiltercar-tomeasuretotalparticleconcentrationgreaterthantridges,fo
5、rwhichseparatemethods(SEMIC14)have0.01μm.beendeveloped.5.3TestEnvironments—Thetestcomponentshould3.2POUfiltersaredesignedandoftenusedtotoler-beunpackedandassembledinaClass100cleanareaateavarietyofconditions(e.g.,baking,high-pressuretopreventambientcontamination.Referto5.9fordrop,transientpr
6、essuresurges)withoutcompromisinginstallationprecautions.theremovalofparticles.Therefore,asinglepenetra-tiontestisnotsufficient.Asequenceoftests,designed5.4ConfigurationforBreak-InTest—Theapparatustomeasurefilterresponsesundervariousconditions,isconsistsof(1)aflowcontrolsystemthatcanaccu-nec
7、essaryforPOUfilterevaluation.ratelyregulateflowat2flowrates,theminimumandmaximumsystemdesignflowrates,(2)a25cm(103.3Theorderofthetestsequencewillaffectthetestin.)cartridgefilterimmediatelyupstreamofthetestresults,anditisdesignedforfaircomparisonsofdif-fi
