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1、4SEMIF29-0997N/A?SEMI1997TESTMETHODFORPURGEEFFICACYOFGASSOURCESYSTEMPANELS1Purposeentinstrumentswillreportdifferentpeakheightswhenmeasuringidenticalcontaminantspikes.Therefore,1.1ThisdocumentdeTnesthepurgeefTcacytestresultsoftestsshouldonlybecomparedwhensimila
2、rmethodrecommendedfordeterminingtheminimumanalyzersareused.acceptablelevelofpurgeefTcacyforgassourcesys-temsusedinsemiconductormanufacturing.Itisalso4ReferencedDocumentsintendedasanaidtotheprocurementofgassourceequipment.None.NOTE:UsersofthisspeciTcationareenc
3、ouragedto5TerminologysubmitsuggestedrevisionsorothercommentstoSEMI.5.1cleandryair(CDA)?FilteredairTlteredto0.02mmanddriedtoadewpointofatleast-80?C.2Scope5.2drydown?Removalofresidualmoistureinagas2.1ThisspeciTcationappliestogassourceequipmentdeliveryordistribut
4、ionsystem,oftenaccomplishedbyusedinsemiconductormanufacturingfacilitiesand?owingastreamofhighpuritydryinertgascontinu-comparableresearchanddevelopmentareas.Itouslythroughthesystemforanextendedperiodofincludescontaminationtestingrequirementsforgastime.sourcesys
5、tems.5.3dwelltime?Thetimeforwhichvacuumorpres-2.2Thetestscoveredbythisdocumentareasfollows:sureisappliedduringtheevacuationorpressurizationstepsofapurgeoperation.2.2.1PurgeefTcacywithanon-interactivegasusingmanufacturers'standardpurgesequence.5.4interactivegas
6、?Agasthatwillreadilyadsorbtothesurfaceofavesselusedtocontainortransportit.2.2.2PurgeefTcacywithanon-interactivegasusingExamplesofinteractivegasesarehydrogenchloridethetestmethodspeciTedpurgesequence.andmoisture.2.2.3PurgeefTcacywithaninteractivegasusing5.5non-
7、interactivegas?Agasthatwillnotadsorbmanufacturers'standardpurgesequence.tothesurfaceofavesselusedtocontainortransportit.2.2.4PurgeefTcacywithaninteractivegasusingtheExamplesofnon-interactivegasesareoxygenandtestmethodspeciTedpurgesequence.nitrogen.5.6ppb?Molar
8、partsperbillion,sameasppbv.3Limitations5.7ppm?Molarpartspermillion,sameasppmv.3.1Thedocumentisnotintendedtodeterminethesafeoperationofagassourcesystem.Thetestmethod5.8pigtail?Thepi
