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1、第28卷第3期傳感技術(shù)學(xué)報VolI28No．32015年3月CHINESEJOURNALOFSENSORSANDACTUATORSMar．2O15DesignofMEMSPiezoelectricandElectromagneticHybridVibrationalMicro-PowerHarvestingDevicesHE死，YANGfie，KONGLingfie，CHENXiaoyong，CHENDonghong，YANLe，CHOUXiujian(NaantidonDaylnKaemyic
2、LaMbeoarsautorermeyfonrt，ENloecrthronUinciMveersaistyuroefmeCnhtinTaec，hMnionliosgtry，KeyLaboratoryofzScienceofEducation，Taiyuan030051，China)Abstract：AMEMSpiezoelectricandelectromagnetichybridvibrationalmicro-powerharvestingdeviceswasproposedbasedont
3、hesingleeffectofMEMSmicro·power．Thesensorconsistsofeightcantileverbeams—centerqualityblockstructureandpermanentmagnet．Thoughtheenvironmentvibration，PZTpiezoelectricunitsproducevoltagebyexternalforceduetopiezoelectriceffect；atthesametime，high-densityc
4、oilwhichisintegratedoncentermass，cuttinglinemagneticinductionvoltageisinduced．Wecanintegratethetwoenergyconversionsofpiezoelectricandelectromagneticpowergenerationwhichimprovestheoveralloutputvoltageofdevice．Thecalibra-tionmethodandfiniteelementmetho
5、dfortheaccelerometerwasproposed．Finally，theexperimentalresultswerepresented．Theexperimentalresultsshowthattheresonantfrequencyofthemicro—powerdeviceis8Hz，whichiseasytoreachtoenvironmentalvibrationresonance．Opencircuitoutputpeak-peakvoltageofthepiezoe
6、lectricpartis154mVandopencircuitoutputpeak-peakvoltageoftheelectromagneticpartis8mVundertheaccelerationof1gandfeguencyof8Hz．Anditisexpectedtoslovingthepowersupplyproblemofwirelesssensornetworknodes．Keywords：vibrationalpowerharvesting；piezoelectric／el
7、ectromagneticeffect；MEMS；micro—power；ANSYSEEACC：7230doi：10．3969／j．issn．1004-1699．2015．O3．008MEMS壓電一磁電復(fù)合式振動驅(qū)動微能源的設(shè)計術(shù)賀婷，楊杰，孔齡婕，陳曉勇，陳東紅，燕樂，丑修建(中北大學(xué)電子測試技術(shù)國防重點實驗室，儀器科學(xué)與動態(tài)測試教育部重點實驗室，太原030051)摘要：在單一效應(yīng)的MEMS振動驅(qū)動微能源的基礎(chǔ)上，提出了一種MEMS壓電一磁電復(fù)合振動驅(qū)動微能源器件。該微能源由八懸臂梁一中心質(zhì)量
8、塊結(jié)構(gòu)和永磁鐵兩部分組成，環(huán)境振動使中心質(zhì)量塊振動，PZT壓電敏感單元由于壓電效應(yīng)產(chǎn)生電勢差；同時中心質(zhì)量塊上集成的高密度線圈切割磁感線產(chǎn)生感應(yīng)電動勢，將壓電轉(zhuǎn)換與磁電轉(zhuǎn)換相結(jié)合把振動能轉(zhuǎn)換為電能。建立了該結(jié)構(gòu)的數(shù)學(xué)模型并用有限分析軟件Ansys12．0對該器件進(jìn)行力學(xué)特性分析，最后對加工出的微能源進(jìn)行性能測試。測試結(jié)果表明，該微能源諧振頻率為8Hz，易與環(huán)境發(fā)生共振；在共振條件下，施加lg的加速度，器件壓電發(fā)電開路輸出電壓峰峰值達(dá)154mV，磁電發(fā)電開路輸出電壓峰一峰值達(dá)8mV，有望為無線傳感
