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1、第28卷第3期傳感技術(shù)學(xué)報VolI28No.32015年3月CHINESEJOURNALOFSENSORSANDACTUATORSMar.2O15DesignofMEMSPiezoelectricandElectromagneticHybridVibrationalMicro-PowerHarvestingDevicesHE死,YANGfie,KONGLingfie,CHENXiaoyong,CHENDonghong,YANLe,CHOUXiujian(NaantidonDaylnKaemyic
2、LaMbeoarsautorermeyfonrt,ENloecrthronUinciMveersaistyuroefmeCnhtinTaec,hMnionliosgtry,KeyLaboratoryofzScienceofEducation,Taiyuan030051,China)Abstract:AMEMSpiezoelectricandelectromagnetichybridvibrationalmicro-powerharvestingdeviceswasproposedbasedont
3、hesingleeffectofMEMSmicro·power.Thesensorconsistsofeightcantileverbeams—centerqualityblockstructureandpermanentmagnet.Thoughtheenvironmentvibration,PZTpiezoelectricunitsproducevoltagebyexternalforceduetopiezoelectriceffect;atthesametime,high-densityc
4、oilwhichisintegratedoncentermass,cuttinglinemagneticinductionvoltageisinduced.Wecanintegratethetwoenergyconversionsofpiezoelectricandelectromagneticpowergenerationwhichimprovestheoveralloutputvoltageofdevice.Thecalibra-tionmethodandfiniteelementmetho
5、dfortheaccelerometerwasproposed.Finally,theexperimentalresultswerepresented.Theexperimentalresultsshowthattheresonantfrequencyofthemicro—powerdeviceis8Hz,whichiseasytoreachtoenvironmentalvibrationresonance.Opencircuitoutputpeak-peakvoltageofthepiezoe
6、lectricpartis154mVandopencircuitoutputpeak-peakvoltageoftheelectromagneticpartis8mVundertheaccelerationof1gandfeguencyof8Hz.Anditisexpectedtoslovingthepowersupplyproblemofwirelesssensornetworknodes.Keywords:vibrationalpowerharvesting;piezoelectric/el
7、ectromagneticeffect;MEMS;micro—power;ANSYSEEACC:7230doi:10.3969/j.issn.1004-1699.2015.O3.008MEMS壓電一磁電復(fù)合式振動驅(qū)動微能源的設(shè)計術(shù)賀婷,楊杰,孔齡婕,陳曉勇,陳東紅,燕樂,丑修建(中北大學(xué)電子測試技術(shù)國防重點實驗室,儀器科學(xué)與動態(tài)測試教育部重點實驗室,太原030051)摘要:在單一效應(yīng)的MEMS振動驅(qū)動微能源的基礎(chǔ)上,提出了一種MEMS壓電一磁電復(fù)合振動驅(qū)動微能源器件。該微能源由八懸臂梁一中心質(zhì)量
8、塊結(jié)構(gòu)和永磁鐵兩部分組成,環(huán)境振動使中心質(zhì)量塊振動,PZT壓電敏感單元由于壓電效應(yīng)產(chǎn)生電勢差;同時中心質(zhì)量塊上集成的高密度線圈切割磁感線產(chǎn)生感應(yīng)電動勢,將壓電轉(zhuǎn)換與磁電轉(zhuǎn)換相結(jié)合把振動能轉(zhuǎn)換為電能。建立了該結(jié)構(gòu)的數(shù)學(xué)模型并用有限分析軟件Ansys12.0對該器件進(jìn)行力學(xué)特性分析,最后對加工出的微能源進(jìn)行性能測試。測試結(jié)果表明,該微能源諧振頻率為8Hz,易與環(huán)境發(fā)生共振;在共振條件下,施加lg的加速度,器件壓電發(fā)電開路輸出電壓峰峰值達(dá)154mV,磁電發(fā)電開路輸出電壓峰一峰值達(dá)8mV,有望為無線傳感