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1、第48卷第9期舍屬學(xué)坂、1．48NO．92012年9月第1132-1138頁ACTAMETALLURGICASINICASept．2012PP．1132—1138Mo含量對(duì)TiMoN薄膜微觀組織和摩擦磨損性能的影響許俊華鞠洪博喻利花(江蘇科技大學(xué)先進(jìn)焊接技術(shù)江蘇省重點(diǎn)實(shí)驗(yàn)室，鎮(zhèn)江212003)摘要采用射頻磁控濺射制備不同Mo含量的TiMoN薄膜．利用XRD，SEM，EDS，納米壓痕儀和高溫摩擦磨損實(shí)驗(yàn)對(duì)薄膜的相結(jié)構(gòu)，形貌，成分，力學(xué)性能和摩擦磨損性能進(jìn)行分析．結(jié)果表明，TiMoN薄膜為fcc結(jié)構(gòu)；當(dāng)Mo占金屬元素總量的比例X<68．37％(原子分?jǐn)?shù))時(shí)，薄膜主要為Mo在TiN中的置換固溶體
2、；當(dāng)X>68．37％時(shí)，薄膜主要為Ti在M02N中的置換固溶體；隨Mo含量的增高，擇優(yōu)取向發(fā)生改變，晶粒尺寸逐漸減小，薄膜的顯微硬度顯著升高，最高達(dá)36．37GPa，摩擦系數(shù)逐漸降低，并在x達(dá)到68．37％后穩(wěn)定在0．4左右；不同Mo含量的TiMoN薄膜的磨損率在lO一一10一mm／i之間，優(yōu)于TiN薄膜．基于晶體化學(xué)理論，對(duì)TiMoN薄膜低摩擦系數(shù)的原因進(jìn)行了討論．關(guān)鍵詞射頻磁控濺射，TiMoN薄膜，微觀組織，摩擦磨損中圖法分類號(hào)TG174．444文獻(xiàn)標(biāo)識(shí)碼A文章編號(hào)0412—1961(2012)09—1132-07EFFECTSoFMoC0NTENToNTHEMICR0STRUCTUR
3、EANDFRICTIoNANDWEARPRoPERTIES0FTiMoNFILMSxUJunhua．JUHongbo．YULihuaKeyLaboratoryofAdvancedWeldingTechnologyofJiangsuProvince，JiangsuUniversityofScienceandTechnologyZhenjiang212003Correspondent：Junhua．professor,2(0511)84411035。E—mail：jhxu@just．edu．c佗SupportedbyN8tionalN8turalScienceFoundationo／China
4、(No．51o74o8o)andN8tureScienceFoundationo．fJiangsuProvince(No．BK2008240)Manuscriptreceived201i-12—03，inrevisedform2012—05—25ABSTRACTOverthepastyears．hardwearresistantTiNcoatingsdepositedbymagnetronsputteringhaveRainedincreasingimportanceinthefieldofdecorativeandcuttingtoolcoatings．Withtheongoingtre
5、ndtomultifunctionaloperatingcuttingtools，newsolutionsinthedesignoftoolsaredemanded．ThealloyingofTiNcoatingswithadditionalelementsforinstance．caneffectivelyenhancehardness．wearresistanceandSOon．BothTiAlNandTiSiNcoatings．wel1studiednitridesystemsyieldsuperioroxidationresistance，andextendtheIifeofcut
6、tingtoolsbysignificantmarginsincomparisonwithTiNcoatings．NumerousresearchactivitiesfoCUSonTiA1N．TiSiNsystems．whereaslimitedefortshavebeenmadetocharacterizeTiMoNcoatings．Lowape伍cientoffrictionisacommonpropertyinvariousMo——containingcoatingsthatcanreactwithoxygenintheairintoMagn6liphase(MOO3)．Theefe
7、ctsofMOalloyingonmechanicalpropertiesandwearresistanceofTiN-basedcoatingsremaintobeinvestigated．TiMONcompositefilmswithvariousM0concentrationsweredepositedusingRFreactivemagnetronsputteringandcharacterizedbySEM．E
