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1、加工、測量與設(shè)備Processing,MeasurementandEquipment微流體系統(tǒng)中微通道制作工藝的研究進(jìn)展張高朋,田桂中,曹偉龍(江蘇科技大學(xué)機(jī)械工程學(xué)院,江蘇鎮(zhèn)江212003)摘要:微通道作為決定微流體系統(tǒng)性能的關(guān)鍵元件,其制作材料、工藝與裝備是微機(jī)械領(lǐng)域的研究熱點(diǎn)?,F(xiàn)有微通道制作材料主要有硅及其氧化物、玻璃、聚合物三種。綜述了不同材料微通道制作工藝的國內(nèi)外研究現(xiàn)狀,包括光刻、腐蝕、熱壓印、軟化拉伸和鍵合等方法。討論了現(xiàn)有微通道制作工藝及其設(shè)備的特征與不足,工藝過程涉及精密機(jī)械加工、化學(xué)處理、工程材料、圖像處理和自動控制等眾多學(xué)科,所加工微通道截面多
2、呈矩形、三角形或半圓形,制作設(shè)備結(jié)構(gòu)復(fù)雜、功能單一且成本高昂。展望了仿生微通道發(fā)展方向,簡要介紹了玻璃基仿生微通道優(yōu)化模型和制作設(shè)備的研究進(jìn)展。關(guān)鍵詞:微電子機(jī)械系統(tǒng)(MEMS);微流體系統(tǒng);微通道;仿生微機(jī)械;自然微通道中圖分類號:TH703文獻(xiàn)標(biāo)識碼:A文章編號:1671—4776(2013)08—0512—06ResearchProgressoftheMicro—ChannelFabricatingProcessintheMicrofluidicSystemZhangGaopeng,TianGuizhong,CaoWeilong(SchooloJMechani
3、calEngineering,JiangsuUniversityofScienceandTechnology,Zhenjiang212003,China)Abstract:Asthekeycomponentsofthemicro—fluidicsystemperformance,thefabricatingmate-rials,processesanddevicesofthemicro—channelareresearchhotspotsinthefieldofthemicro—electromechanicalsystem(MEMS).Nowadays,thema
4、infabricatingmaterialsforthemicro—channelaresiliconanditsoxides,glassandpolymer.Theoverseasanddomesticresearchstatu—sesofmicro—channelfabricatingprocesseswithdifferentmaterials,suchasthelithography,etching,hotembossing,thermo—softeningandstretching,bonding,aresummarized.Thelea—turesand
5、defectsofexistingtechnologiesandprocessingequipmentsformicro——channelsaredis——cussed.Themanufacturingprocessinvolvesthedisciplinesofprecisionmachining,chemicaltreatment,engineeringmateria1,imageprocessingandautomaticcontrol,etc.Thesectionsofthemicro—channelsarealmostrectangular,triangu
6、larorsemicircular,andtheprocessingequip—mentshavecomplexstructure,singlefunctionandhighlyexpensive.Thedevelopmentdirectionsofthebio—microchannelareprospected.Theresearchprogressesoftheoptimizedmodelandpro—cessingequipmentfortheglassbio—microchannelarebrieflyintroduced.Keywords:micro—el
7、ectromechanicalsystem(MEMS);micro—fluidicsystem;micro—channel;bio—micromachine;naturemicro—channe1DoI:10.3969/i.issn.1671—4776.2013.08.007EEACC:2575F收稿日期:2013-05—22基金項(xiàng)目:國家自然科學(xué)基金資助項(xiàng)目(51005108);江蘇科技大學(xué)人才引進(jìn)基金資助項(xiàng)目(35020808)通信作者:田桂中,E-mail:tianshuanger@126.com512MicronanoelectronicTechnolo