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1、SEMIG48-89N/A?SEMI1989,1996SPECIFICATIONFORMEASUREMENTMETHODFORMOLDEDPLASTICPACKAGETOOLING1Prefacedatummarksclearlylabeled.Overlaysaretoolswhichspeedinspection;however,rejectsmustbeveriTedbyThisdocumentispreparedtoenablestandardmeasure-toolmaker'smicroscopemeasuremen
2、ts,whicharementtechniquestobeused.Itisintendedthatthemea-moreaccurate.surementtechniquesdescribedinthespeciTcationwillapplytoallmoldedplasticpackagetooling,i.e.DIPS,3.1.3DigitalDepthIndicator?Mountedonastand.SIPS,PCC,SO,Quad,andTAB.Digitalreadingwitharangeof2"isavail
3、able.Readoutmustdisplayincrementsof.0001"with±1digitaccu-2ApplicableDocumentsracy.2.1SEMISpeciTcations3.1.4Micrometer?0to1.0"..250"diameterformeasuringto.001"accuracy.SEMIG14?PlasticMoldedDIPTooling3.1.5Eight(8)inchdialcalipersformeasuringtoSEMIG16?PlasticChipCarrier
4、Tooling.002"accuracy.SEMIG36?PlasticMoldedHighDensityTABQuad3.1.6GraniteSurfacePlate?MinimumsizeTooling18"′28",withasurfaceaccuracyof.0002"orbetter.SEMIG37?PlasticMoldedSOPackageTooling3.1.7SurfaceFinish3BasicEquipment3.1.7.1CharmilleVisualSurfaceFinishStandard?3.1Th
5、efollowingbasicequipmentisrequiredtoper-(ForcomparisonofElectricDischargeMachinedformthespeciTedmeasurements:(EDM)surfaceonly.)3.1.1Toolmaker'sMicroscope?3′objectiveand3.1.7.2SurfaceComparatorStandards?(Forother10′eyepiecetotal30′withXandYaxesdigitalread-machinedsurf
6、aces.)outsreadingto.0001".Minimumtravelofstagemust3.1.7.3SurfaceAnalyzerbe2.0"′2.0".Eyepiecemusthavecross-hairlines.Accuracyofthesystemmustbe±.0002"minimum.3.1.8Binocular,ZoomMicroscope?10-15′mag-Thetoolmaker'smicroscopeshouldhaveagoniometerniTcationwithverticalornea
7、rverticallighting.ontheeyepieceaswellasonthestage.Accuracyofthe3.1.9DialIndicators?Withaccuracyof.0001andgoniometershallbe0.1.TheTMmicroscopeshouldwithforcenottoexceed5grams.haveaZaxiswithadigitalmeasurementcapability,3.2AlternativeEquipment?Sophisticated,auto-readin
8、ginincrementsof.0001".Theobjectivelensmaticequipmentisnotexcludedfromuse,buttheusermustbe20′minimumwhichwillgive.0005"accu-mustensu
