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1、CONFIDENTIAL利用晶體生長軟件FEMAG對藍(lán)寶石晶體生長仿真模擬方法FEMAGSoftS.A.,BelgiumASPIN-OFFcompany fromUniversitecatholiquedeLouvainBelgium ProfessorF.DupretCONFIDENTIALGeneralintroductionSapphireGrowthContentCONFIDENTIALIntroductionFormorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearcha
2、nddevelopmentofoptimalcrystalgrowthprocesses.1984FirstresearchonGermaniumgrowthinUniversityofLouvain. Prof.Fran?oisDupret1989FirstresearchonSilicongrowthinUniversityofLouvain.1992FirstcollaborationswithmajorICcompanies.Developmentofdefect-freesiliconwaferproduction.Today,morethan35patent
3、sarereferencingFEMAGSoftware2003FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006CollaboratrionwithmajorSolarcompanies.Developmentoflow-costandlow-oxygencontentprocesses.2009Largeinvestmentforanewsoftwareframework2010ReleaseofSoftwareapplicationforSapphireingotproduction.CONFIDENTIALCzo
4、chralskiprocessCONFIDENTIALDirectionalSolidificationSystemCONFIDENTIALFloatingZoneProcessCONFIDENTIALSapphireGrowthbyCZandkyropoulosCONFIDENTIALSapphiregrowthbyHEMCONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.GlobalA
5、llthefurnacecomponentsareconsidered.Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependentCONFIDENTIALProcess-dedicatedtoolsFEMAG-CZ:CzochralskiFEMAG-FZ:FloatingZoneFEMAG-VB:VerticalBridgmanFEMAG-CZ/OX:Czochralskifo
6、rSapphireFEMAG-KY:KyropoulosFEMAG-DS:DirectionalSolidificationFEMAG-HEM:HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepointCONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Verya
7、ccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand…CONFIDENTIALGlobalsimulationsCzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditionsCONFIDENTIALDynamicsimulationsAdynam
