矩形平面移動(dòng)濺射靶的設(shè)計(jì)畢業(yè)論文

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1、------------------------------------------------------------------------------------------------矩形平面移動(dòng)濺射靶的設(shè)計(jì)畢業(yè)論文矩形平面移動(dòng)濺射靶的設(shè)計(jì)畢業(yè)設(shè)計(jì)（論文）任務(wù)書（201屆）設(shè)計(jì)（論文）題目矩形平面移動(dòng)濺射靶的設(shè)計(jì)學(xué)院名稱機(jī)械與汽車工程學(xué)院專業(yè)（班級(jí)）機(jī)械設(shè)班姓名（學(xué)號(hào)）指導(dǎo)教師系（教研室）負(fù)責(zé)人1/23矩形平面移動(dòng)濺射靶的設(shè)計(jì)目錄矩形平面移動(dòng)濺射靶的設(shè)計(jì).............................................

2、.4摘要..................................................................4ABSTRACT..............................................................51緒論................................................................61.1真空鍍膜的意義...................................................61.2真空鍍

3、膜技術(shù)在國內(nèi)外的發(fā)展?fàn)顩r...................................61.3陰極靶的重要性...................................................7——————————————————————————————————————------------------------------------------------------------------------------------------------1.4課題的研究背景........................

4、...........................71.5設(shè)計(jì)要解決的問題.................................................82設(shè)計(jì)方案的確定......................................................82.1真空鍍膜中陰極靶的種類...........................................82.1.1矩形平面磁控濺射靶...........................................92.1.2同軸圓柱形

5、磁控濺射鍍膜.......................................92.1.3圓形平面磁控濺射靶..........................................102.2初步的幾種設(shè)計(jì)思路..............................................102.2.1方案一：圓形旋轉(zhuǎn)靶..........................................102.2.2方案二：矩形移動(dòng)靶..........................................

6、112.3最后方案的確定..................................................123陰極靶的結(jié)構(gòu)設(shè)計(jì)和尺寸計(jì)算.........................................123.1靶的結(jié)構(gòu)........................................................123.2靶的尺寸計(jì)算....................................................143.3磁場強(qiáng)度的選擇...................

7、...............................153.4磁場均勻性......................................................153.5矩形平面靶磁場計(jì)算..............................................163.6傳動(dòng)裝置的設(shè)計(jì)..................................................163.7真空室選泵的計(jì)算................................................

8、173.7.1粗算主泵抽速.........................................