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1、臺(tái)積六廠節(jié)能措施簡(jiǎn)介Fab-6Fab-14臺(tái)積六廠節(jié)能措施簡(jiǎn)介六廠介紹………………….1~3節(jié)約能源措施建廠設(shè)計(jì)階段………..4~22生產(chǎn)運(yùn)轉(zhuǎn)階段……….23~2990年度節(jié)能計(jì)劃…….30~31參觀路線圖……………..32六廠介紹BuildingTotalFloorSpace:162,237m2TotalCleanRoomSpace:17,648m2TechnologyCapability:0.25/0.18/0.15/0.13mmMaximumCapacity:≧60,000/month(8
2、”)CUP14/15CUP6WarehouseCUP17CUP16CentralSupportFab-16300mmFab-17300mmCentralSupportFab-14300mmFab-15300mmCUP18Fab-18300mmFab-6OfficeOfficeR&DAdmnDormitoryFab-15300mmBulkGasYard1Fab-6ProfileFab-6isthefirstofthesixfabsTSMCplanstoestablishintheTainanSci
3、enceIndustrialPark(TSIP).Fab-6brokegroundinJuly1997andstartedproductioninJanuary2000.Capacity50,000pcsof8-inchwaferand4,500pcsof12-inchwaferpermonthTechnologyAdvancedCMOStechnologyrangingfrom0.25μmdownto0.10μm.Featuringstate-of-the-artmanufacturingca
4、pabilitiesofall-scannerlithography,shallowtrenchisolation,Titanium/CobaltSalicide,chemicalmechanicalpolishing,low-kdielectrics,andcopperinterconnect.ProductMixDigitallogicproducts,mixed-signallogicproducts,standardandembeddedmemoryproducts.CleanRoomM
5、ini-environment:Class0.1Ballroom:Class1002KeyMilestones07/‘97Fab-6Ground-BreakingCeremonyThefirstfabinTainanScience-basedIndustrialPark09/’97PillingStartMorethanthreethousandsofRCpilesweredrilledintoground25meterdeeptoreachbedrock.02/’98ErectionofSte
6、elStructure10/’99ProcessToolsMoveInThemostadvanced0.25~0.10micronsemiconductortechnology12/’99SuccessfulPilotof0.25and0.22μmProducts01/’00ProductionStart06/’00AchievedtheFirst10KWafersOutput07/’00Release0.18umtoFullProduction12/’00Achieved30KWafersOu
7、tput3節(jié)約能源措施建廠設(shè)計(jì)階段1.儲(chǔ)冰式空調(diào)系統(tǒng)2.冰水主機(jī)熱回收系統(tǒng)3.5oC及9oC之雙冰水溫度系統(tǒng)4.潔淨(jìng)室採(cǎi)mini-environment節(jié)能設(shè)計(jì)5.空調(diào)系統(tǒng),排氣系統(tǒng)及製程用水系統(tǒng),皆使用變頻空制器6.水資源回收7.辦公室及停車場(chǎng)空調(diào)節(jié)能改善生產(chǎn)運(yùn)轉(zhuǎn)階段1.製程用冷卻水(pcw)減量2.潔淨(jìng)室調(diào)整正壓及風(fēng)速設(shè)定節(jié)能改善3.製程排氣減量4.降低冷卻水塔散熱風(fēng)扇的負(fù)載5.照明減量節(jié)能改善90年度節(jié)能計(jì)劃1.增加一臺(tái)酸性洗滌塔，降低整座風(fēng)管系統(tǒng)壓損節(jié)省電能2.高階製程廢水AOR/AWR
8、回收3.晶片乾燥槽廢水MaragoniDryer回收4.化學(xué)機(jī)械研磨廢水回收CMPrecovery4?.措施:?利用離峰電價(jià)優(yōu)惠時(shí)段來儲(chǔ)冰;利用尖峰用電時(shí)段來溶冰,進(jìn)而製造出所需之冰水.?配合國(guó)家之能源政策,有效移轉(zhuǎn)尖峰電力負(fù)載,進(jìn)而降低契約容量.?.效益:?可減少尖峰用電量2,407,014kwh/年?依臺(tái)電夏月及非夏月之離峰與尖峰電價(jià)差計(jì)算,可省3,606,955元/年1.儲(chǔ)冰式空調(diào)系統(tǒng)建廠設(shè)計(jì)階段5儲(chǔ)冰桶(液態(tài))儲(chǔ)冰桶(固態(tài))儲(chǔ)冰桶(固態(tài))儲(chǔ)冰桶(液態(tài))25%乙烯乙二醇出水溫-3.9℃冰水
